스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Spin Processing System
               
Spin Processor   Spin Etcher   Spin Developer  EBR(Edge Bead Removal)  SpinDryer   SpinCoater
               
               
 
Spin Processor
     
 

Spin Processor

Spin Etcher

Spin Developer

EBR(Edge Bead Removal)

 

스핀 디벨로퍼(Spin Developer):
(Spin Developer ) 디벨로핑
,린싱,드라잉     

Fully integrated cabinet for safe and clean etching or developing process

spin-rinse-dryer

Jsi-6060DD 대형 스핀 디벨로퍼 SpinDeveloper
터치패널 PLC 프로그래밍 타입

-Body structure: AL profile
-Body & Bowl :SUS,PVC
-Bowl Size : 900 mm dia. Bowl, PP
-바닥 Bowl Material : SUS 304
-Max Substrate :최대 610mm x 610mm : 200 MM ,300mm, 500mm(선택)
-Rotation Speed :150~1,500rpm RPM
-Spin Acuracy :+-0.5%,
-Step :PLC Programming ,10 step, ,10 Memoriy 기능
- Auto Swing Nozzle Arm Type ,
-Timer:0-999 seconds
-PR Coating, Diveloping Di-Water Rinsing 기능
- 3 Dispensing Line (PR Coating , Developing , Di Water Rinsing
-Dispensing nozzle: 1/8”~1/4” PFA tube's end Chemical valve 사용
- 3 Bottle ( 10리터 x3)
Pressure tank for bottle : photoresist,Developer,Di-Water, SUS304
-Drain : Drain Bottle: PP 18 L
-기본 Chuck 포함 : 유저와 협의하에 제작
-알미늄 구조물에 안착, 정면 유리 도어
-Dry Vacuum pump ( 100L/ min) 포함
Utility
-Exhaust: 125A, 1 port, 수동
-CDA: 5 Kg/ cm2 이상
-Electricity; 1 phase, 220V, 20A
Dimension : 1400w*1200h*1700d mm
용도:,글라스 PR 코팅 ,디벨로핑 , 린싱,

 

 

   
   

 

 

 

See also our other models:

Cleaning

Etching

 

Spin Process Station
 
Shop » Models » Stations크리닝 & 드라이용 스핀프로세서


 

 

     

Compact integrated solution in single cabinet:

  • Full 플래스틱 하우징 :10mm Thick NPP or PVC
  • 이지 프로세스 콘트롤이 가능한 투명 한 윈도우
 

 

SpinDryer

SpinCoater

 

 

Coater equipped with:

  • Fully automated dosing pump
  • Dynamic movable dispense arm with constant or Rpm related speed control for maximum uniformity among whole substrate surface
  • Nitrogen dry :optionally available through lid or movable arm
  • Digitally controlled brushless motor with highly accurate speed control and acceleration selectable per recipe step
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

     

Wafer 3-point mechanical gripper

Wafer Edge Pick

Applications:

  • Drying
  • Rinse/clean
  • Etching
  • Manual coating
  • Automatic coating
  • Developing

 

 

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

   
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

   
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

   
 


재성ITS co.

경기도 안양시 동안구 호계 555-9 안양 국제 유통단지 17동 127호
 Tel : (031) 479-4211/2, Fax : (0504) 460-0288

1992-2023 ,Jsi.co. All rights reserved  

Contact us :contrabase26@gmail.com jsi@jsits.com