½ºÇÉÄÚÅÍ(Spincoater)

¸¶½ºÅ©¾ó¶óÀ̳Ê(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
 
WAFER 3-POINT MECHANICAL GRIPPER
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-G3
WAFER 3-POINT MECHANICAL GRIPPER

Wafer Size: 2" 3" 4" 6" 8" 12"


 

     


A normally closed (consistent-Force) edge exclusion mechanical pick For handling 50 mm up to 200 mm round substrates from the wafer edge. The gripper material is PTFE Teflon. The wafer contact pad is perfluoro elastomer strip for grip hold on the wafer without scratching or leaving out-gassing behind. ISO Class 4.

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

Compound and Thin Wafer Compatible
<3 mm Edge Contact
From 50 mm up to 200 mm
Ergonomic Left/Right hand use
Applications: Transfer, Inspection, Mask Aligners, Cleaning
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

 

     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

 
     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

 
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

 
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

 

 

 


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