스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
 
Process 300mm Cassettes
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-M4
Process 300mm Cassettes

Wafer Size: 12"

 

     

Material
Aluminum | Finish: Hard Clear Anodized (HC)

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

High Temperature Applications up to 350°C
Strong, Dimensionally Stable Design
SEMI 300mm Automation Compliant
Long Lasting Abrasion Resistant Materials
Ergonomic Fix-Mounted Side Handles
Locking Bar for Safe Transport
Lighter than FOUP
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

         
    Slot:
25 slot
Top/Bottom
Cover Plate/Docking Option
       

Wafer 3-point mechanical gripper

Wafer Edge Pick



           
     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm


Applications:

Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.

Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.

Our WHS M4 Serie aluminum metal cassette for 300 mm (12”) diameter wafers. SEMI compliant 25-slot, 10 mm (0.393”) pitch cassette with kinematic couplings and side handles in the profile of an industry FOUP. Features locking lock bar for safe wafer transport. Hard clear (HC) anodized abrasion resistant aluminum surface finish. For thermal automation processing and general bake applications up to 350°C.


     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

 
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

 
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

 

 

 


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