WHS-M4
Process 300mm Cassettes
Wafer Size: 12"
Material
Aluminum | Finish: Hard Clear Anodized (HC)
Strong, Dimensionally Stable Design
SEMI 300mm Automation Compliant
Long Lasting Abrasion Resistant Materials
Ergonomic Fix-Mounted Side Handles
Locking Bar for Safe Transport
Lighter than FOUP
25 slot
Cover Plate/Docking Option
Applications:
Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.
Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.
Our WHS M4 Serie aluminum metal cassette for 300 mm (12”) diameter wafers. SEMI compliant 25-slot, 10 mm (0.393”) pitch cassette with kinematic couplings and side handles in the profile of an industry FOUP. Features locking lock bar for safe wafer transport. Hard clear (HC) anodized abrasion resistant aluminum surface finish. For thermal automation processing and general bake applications up to 350°C.
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