스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Spin Processing System
               
Spin Processor   Spin Etcher   Spin Developer  EBR(Edge Bead Removal)  SpinDryer   SpinCoater
               
               
 
Spin Rinse Dryer
     
 

Spin Processor

Spin Etcher

Spin Developer

EBR(Edge Bead Removal)

 

스핀에처/디벨로퍼:
( Spin Etcher for Etching,Developing & Cleaning )
세정(식각), 클리닝, 드라잉     

Fully integrated cabinet for safe and clean etching or developing process

spin-etcher

Spin Etcher JS-84E : 스핀에처

-Manual loading unloading 에칭, 린싱 system
-Full Plastic Housing
- 2 Chemicals Etching , DI-Water Rinsing ,Spin Drying
-Temperature Control for Chemicls (0~50C)
-Max Substrate :최대 200 MM Φ or 125mm x 125mm ,300mm,500mm(선택)
-Speed :1~2,000rpm RPM,
-Fixed dispencing spraying nozzles
-Chemical resistant bowl(PTFE) ,and Bath
-Chemical Flow Rate control by flow meters
-N2 or Clean air Dry Dispensor Nozzle
- 8" Chuck
-4 Dispensing 용 Tubing ,Nozzle( Bath with Heating System :상온 ~50C)
acid, alkali, organic solvent, organic solvent용
-DI-Water Rinsing Line :중앙 공급 라인용
-Nozzle Type : dispensing Type
-Programmable :Unlimited
-automatic chemical dispense, heavy duty motor, including:
- Touchscreen with Customisable Icons ,USB Port
- 1" Drainconnection
-Timer:0-999 seconds
-Tranaparent window
-Programmable Process Control for Speed, Time and step..Valve
- Dimension :1000Wx1500Dx1800H mm

 

 

   
spin-dispenser  

 

 

 

See also our other models:

Cleaning

Etching

 

Spin Process Station
 
Shop » Models » Stations크리닝 & 드라이용 스핀프로세서


 

 

     

Compact integrated solution in single cabinet:

  • Full 플래스틱 하우징 :10mm Thick NPP
  • 이지 프로세스 콘트롤이 가능한 투명 한 뚜껑
  • DI-water and Nitrogen spray Nozzle Located in
  • 개스 누출방지 설계적용
 

 

SpinDryer

SpinCoater

 

 

Coater equipped with:

  • Fully automated dosing pump
  • Dynamic movable dispense arm with constant or Rpm related speed control for maximum uniformity among whole substrate surface
  • Nitrogen dry :optionally available through lid or movable arm
  • Digitally controlled brushless motor with highly accurate speed control and acceleration selectable per recipe step
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

     

 

 

Applications:

  • Drying
  • Rinse/clean
  • Etching
  • Manual coating
  • Automatic coating
  • Developing

 

 

 

     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

   
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

   
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

   
 


재성ITS co.

경기도 안양시 동안구 호계 555-9 안양 국제 유통단지 17동 127호
 Tel : (031) 479-4211/2, Fax : (0504) 460-0288

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