스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
               
 
WHS PRESENTERS & ESCALATORS
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-P1
Automatic Single Wafer Presenter

Wafer Size:3" 4" 6" 8"

 

     

 

-Type:Automatic
-25 slot

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

Scratch Reduction Tool
Macro Wafer Inspection Station
Wafer Flipping / Inverting
Antistatic Construction
SEMI Automation Compliant
Recipe Programmable
Safe Edge Handling Lift Blade
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

Wafer inspection - Wafer presenters are used to hold and rotate wafers during inspection, allowing for automated and consistent macro analysis of wafer surfaces and features. Commonly seen in raw wafer production, post-epitaxial inspection, glass wafer haze, scratch, macro defect inspection, and lot process integrity inspections in Photolithography (photoresist) and Probe/Test areas (inking).
Scratch reduction - Scratches on wafers can occur during handling and can result in defects and yield loss. Wafer presenters are designed to lift the wafer up from its cassette, allowing operators to access and handle the wafer without having to physically go between the wafers inside the cassette. This eliminates the need for operators to manually manipulate the wafer and reduces the risk of damage or contamination.
The WHS-P1-301 is an automated single wafer presenter with rotation, designed for 76 mm (3”) diameter wafers. The WHS-P1 fully lifts a single wafer to an operator for removal from a cassette or for wafer inspection applications. The system can also be used to flip the wafer 180° degrees for backside applications. Constructed with antistatic materials, the WHS-P1 is built to meet the strict ISO 3 (FS209E Class 1) standards, ensuring the highest level of protection for your wafers.
 

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

   
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

   
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

   
 


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