½ºÇÉÄÚÅÍ(Spincoater)

¸¶½ºÅ©¾ó¶óÀ̳Ê(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
               
 
Aligners
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-A3
Aligner Automatic Notchfinder

Wafer Size: 6" 8"

 

     

-Type:Automatic
-25 slot

Material
Stage: Anti-Static polyoxymethylene
Roller: Anti-Static Polyurethane

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

 
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

Alignment - Wafer flat and notch aligners are used in the semiconductor industry to ensure that wafers are oriented correctly during various processes, such as lithography, deposition, and etching. The flat aligner has a notch or flat that corresponds to the orientation of the wafer's crystal lattice structure. This is critical because the orientation of the wafer affects the performance and functionality of the final semiconductor device

     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

Lot integrity - Aligners are also used in the semiconductor industry to aid operators in performing lot integrity checks. By rotating the wafer scribe, which is the identification marking on the wafer's edge, to be visible to the operator, the operator can verify that the correct lot of wafers is being loaded into a production tool. This is an important step in preventing errors and ensuring consistent product quality.
     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

Edge inspection - Wafer flat and notch aligners are also used in the semiconductor industry to inspect wafers for edge defects. This macro inspection procedure is usually done under a light source and involves examining the edges of the wafer for any chips, cracks, or other imperfections. This is an important step in preventing wafer breakage during subsequent processing steps, as edge defects can weaken the wafer and cause it to break or fail. By using wafer flat and notch aligners to identify and inspect these defects, operators can take steps to prevent further processing of defective wafers and avoid costly production delays
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

The WHS-A3 serie is an advanced technology automatic wafer notch aligner for alignment of 150 or 200 mm notch wafers. Features a precision notch catch comb assembly paired with an ESD-safe polyurethane roller; touchscreen recipe software for standard alignment, thin wafer/compound wafer alignment and edge inspection recipes. ISO Class 3.
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

 

 

 


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