스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
               
 
Transfers
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-T1
SAFEGUARD WAFER TRANSFER

Wafer Size:3" 4" 6" 8"

 

     

 

-Type:Automatic
-25 slot


 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

Precision Robotically Controlled Bulk Wafer Transfer
Thin, Compound, High-Value Wafer Handling
Gentle lift of wafers, no abrasion
Touch Screen Display
Programmable speed
Even/odd wafer transfer
Wafer flipping/Inverting
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

-Shipping/receiving area:Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.

-Epitaxial area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production or specialty EPI process cassette

     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

Wet chemistry areas: Wafer transfers are used to move wafers between a WIP production cassette to a wet process Teflon PFA cassette when they enter wet chemistry areas. Thermal process bake areas: Wafer transfers are used to move wafers between a WIP production cassette and metal or quartz cassettes when they enter thermal process bake process areas
     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

Probe and test areas: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette. Metrology and inspection areas: Wafer transfers may also occur in metrology and inspection areas where wafers are analyzed and inspected for defects and other quality control measures.
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

   
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

Wafer Flipping/Inverting:Wafer transfers are used to move wafers from one cassette to another that has been inverted 180°.
In semiconductor manufacturing, there are various processes that involve working on the backside of a wafer. These processes can include backside lithography, etching, deposition, and bonding, among others. To carry out these processes, the manufacturer needs to flip the wafer over so that the backside is facing up.

Material:?Stage: Anti-Static PEEK | Rods: Carbon Fiber
Type:Automatic System

Advanced technology automatic SafeGuard wafer transfer for 76 mm up to 200 mm wafers. Engineered for InP, GaAs, GaN and SiC compound wafer handling. Features motorized 25-set transfer arm assembly for gentle lifting of wafers protecting the wafer edge from abrasion or shock to increase yields; touchscreen recipe software for standard operation and password protected service menu for motor, axis control, event logging. Thin and bonded wafer compatible. ISO 3 (FS209E Class 1) Cleanroom Compatible.SEMI Compliant High- and Low-Profile Cassettes

 


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