스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
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Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
 
Openers
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-o1rsp150
MANUAL RETICLE SMIF POD OPENER, RSP150


 

     

Material
Antistatic POM/Anodized Aluminum

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

Compatible with all SEMI E111 and E112 RSP Pods
Antistatic construction with Grounth Path
Integrated Lid holder
Small footprint
Ergonomic Left/Right hand use
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
               

Wafer 3-point mechanical gripper

Wafer Edge Pick



           
     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm


ApplCompatible with all SEMI E111 and E112 RSP Pods
Precision Craftsmanship: Meticulously designed for secure opening and closing of RSP150 reticle SMIF pods.
Effortless Operation: Simplifies pod lid unlocking and facilitates easy removal and storage.
ISO 3 Compliance: Meets stringent ISO 3 (FS209E Class 1) cleanroom standards.
Antistatic Materials: Engineered with antistatic materials to protect valuable masks.
Abrasion Resistance: Durable construction ensures long-lasting performance.
Integrated Lid Storage: Features a built-in lid storage rack for convenience.
Compact Design: Takes up minimal tabletop space for efficient workspace utilization.

The WHS-O1 is a precision manual pod opener meticulously crafted for the secure opening and closing of RSP150 reticle SMIF pods. This compact tabletop device unlocks the RSP’s four spring loaded lock pins and facilitates effortless operator lid removal and placement on the built-in lid storage rack. Compliant with stringent ISO 3 (FS209E Class 1) standards, the WHS-O1 is engineered with antistatic and abrasion-resistant materials, assuring the utmost protection for your valuable masks. To ensure a seamless ordering process, customers interested in purchasing this product are kindly requested to provide the pod model number during their order placement.ications:

Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.

Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.

Our WHS M4 Serie aluminum metal cassette for 300 mm (12”) diameter wafers. SEMI compliant 25-slot, 10 mm (0.393”) pitch cassette with kinematic couplings and side handles in the profile of an industry FOUP. Features locking lock bar for safe wafer transport. Hard clear (HC) anodized abrasion resistant aluminum surface finish. For thermal automation processing and general bake applications up to 350°C.


     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

 
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

 
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

 

 

 


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