½ºÇÉÄÚÅÍ(Spincoater)

¸¶½ºÅ©¾ó¶óÀ̳Ê(Mask Aligner)

 
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Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
 
Sorters
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer


 


WHS-T4
2-Cassette Automation Sorter with OCR

Size:4" 6" 8",Dual size:6"+8"










 

     

-Designed to streamline the wafer sorting process based on their ID
-Splitting, merging, sorting, compressing, or creating individual wafer-mixes
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-Type:Automatic
-25 slot

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

End Effector: Carbon Fiber / Backside Vacuum / MappingID
Reader: Cognex or IOSS; OCR, Barcode, Data Matrix

Throughput: 700 wph
Facilities: 20-240VAC;
Vacuum
Communication: SECS GEM or Text Data Output
Certification: CE
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

-HEIGHT 170 CM, WIDTH 37.3 CM, DEPTH 87.1 CM







     

Wafer 3-point mechanical gripper

Wafer Edge Pick

Wafer Handling System¡¯s WHS-T4 model is a state-of-the-art solution specifically designed to streamline the wafer sorting process based on their IDs. With this system, users can effortlessly customize their wafer-lots by splitting, merging, sorting, compressing, or creating individual wafer-mixes based on their requirements. The system features two ergonomic tilt stage load- ports, linear robot, optical wafer notch/flat aligner and ID reader. It has the capability of dedicated size handling of 100 mm (4¡±), 150 mm (6¡±), 200 mm (8¡±) wafers, or a combination system for 150 mm and 200 mm without any hardware modification.

One of the key features of the WHS-T4 is its compact design, which occupies the smallest footprint sorter in the market, measuring 871 mm x 1700 mm x 373 mm (L x H x W). The system is compatible with silicon, glass, or compound wafers, with a thickness range of 220¥ì - 1000¥ì. The system is an automatic 25 slot cassette sorter, with the option for 12-,13-, 26-Slot cassettes. The system also features an optional internal wafer buffer stage which allows for sorting of 50-wafer size lots. The WHS-T4 features ESD-Safe technology, which helps prevent damage to wafers caused by electrostatic discharge. The WHS-T4 model also boasts an impressive throughput of up to 700 wafers per hour, making it an efficient and reliable solution for high-volume wafer sorting.

 

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

   
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

   
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

   
 


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