스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
               
 
Mask Picks
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-L1
Mask Pick - Side Grip (incl. holder)

MASK SIZE
5X5X0.090
6X6X0.120
6X6X0.250
7X7X0.120
7X7X0.150
9X9X0.120

 

     

 

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

Normally-Closed Tangential-Edge Handling
Antistatic Construction With Ground Path
Ergonomic Left/Right hand use
Adjustable grip force
Applications: Transfers, Inspection, Mask Aligners, Cleaning
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

Transfer - Transferring photomasks and reticles manually between storage boxes in the stockroom mask library and production mask boxes like Reticle SMIF Pods (RSP), Nikon cartridge reticle boxes, or Canon cartridge reticle boxes.
Inspection - Performing macro integrity checks during transfer, where mask handling operators visually inspect masks for bar code ID, particles, chrome defects, contamination, or damage to the pellicle frame or film.
Mask aligners - Loading and unloading photolithography mask aligner tools using mask picks.
Cleaning - Handling photomasks during regular cleaning applications such as spot cleaning and full submersion solvent cleans.
Mask shops - Commonly used in the manufacturing production areas and repair of masks in mask shops.

The WHS-L1 is a normally closed (consistent-force) mechanical pick for handling from 5" up to 9" square photomasks from the tangential edge to reduce contamination by eliminating contact with chrome. Advanced gripper manufacturing for longevity, antistatic properties, and general chemical resistance. ISO Class 3.
 

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

   
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

   
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

   
 


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