스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
 
MECHANICAL WAFER PICKS
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-G1
MECHANICAL WAFER PICKS

Wafer Size:100-125 MM
150 MM
200 MM
50-76 MM

 

     


 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

Compound and Thin Wafer Compatible
Normally-Closed Edge Wafer Handling
Ergonomic Safe Wafer Handling
Perfluorocarbon 3 mm front side touchpad
Antistatic material construction
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

     
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

GRIP:
EDGE GRIP
EDGE GRIP WITH SPATULA

     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm


Specialty wafer handling - General edge only handling of bonded, double topography, Taiko, optical, TSV, MEMS and other wafers that cannot be handled by a backside contact handling methods.

Rescue - Rescuing wafers that are stuck inside a process tool or automation.

Standard handling - Manually transferring, sorting, and loading wafers in a wafer fab. Works for both silicon and compound wafers.

Inspection - Sample inspecting wafers for macro defects, particles, and scratches, which typically requires operators to inspect under specialized lighting.

Economical handling tool - Used as cost-effective and portable alternative to a vacuum wands for general wafer handling applications; and as a replacement for tweezers which leave scratches behind.
A normally closed (consistent-Force) edge exclusion mechanical pick For handling 50 mm up to 200 mm round substrates from the wafer edge. The gripper material is ESD-safe PEEK For longevity, antistatic properties, and general chemical resistance. The wafer contact pad is perfluoro elastomer strip for grip hold on the wafer without scratching or leaving out-gassing behind. ISO Class 4.
     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

 
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

 
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

 

 

 


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