스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

 
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
               
 
Vacuum Wands
     
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

 

WHS-v6-1
Portable Vacuum Wand

Wafer Size:4"~8",12"

 

     

The WHS-V6 is an advanced technology cordless portable battery-powered vacuum wand allows independance from vacuum lines. Provides mobility to go anywhere in the cleanroom. The wireless smart charger base electronics keep the (owner replaceable) Lithium-Ion battery fully charged without the worry of damage from overcharging. Designed for wafer rescue or light-production, ISO Class 3

 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

Self-Contained 600mbar (17.7” Hg Barometric) vacuum
ESD-Safe Antistatic Construction
Advanced HEPA filter 99,99% of 0,3 μm particles
No house vacuum needed
Base unit can handle all wafer sizes and tips/cups
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

 
 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles.

     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

Sorting: For manual wafer sorting applications, vacuum wands allow operators to move wafers safely and precisely within a parent lot. They can also be used to combine lots together, add test wafers, and replace any damaged wafers, as necessary.
     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

Inspection - Operators can use vacuum wands to pull out a wafer from a parent lot and inspect it under specialized lighting to look for defects. This ensures that the process has been successful and that the wafer meets the required specifications
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

Rescue ? Vacuum wands can be used to remove stranded substrates from cassettes, pods, and process tools when automation underperforms.
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

 

 

 


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