스핀코터(Spincoater)

마스크얼라이너(Mask Aligner)

  
Spincoater Home
Wafer Handling System
               
TRANSFERS & SORTERS   WAFER ALIGNERS  VACUUM WANDS   WAFER PICKS   METAL CASSETTES   MASK PICKS   OPENERS   PRESENTERS   TRANSPORT BAGS   MOCK WAFERS
               
               
 
Transfers
      
 

Sorters

SafeGuard Thin/Compound

Automatic Slide Transfer

Manual Slide Transfer

  

WHS-T2
Automatic Slide Transfer

Wafer Size:3" 4" 6" 8"

 

      

 

-Type:Automatic
-25 slot
 

 

Automatic Notch Aligner

Automatic-flat-aligner

Manual-notch-aligner

Manual-flat-aligner

 Antistatic Construction With Wafer and Cassette Ground Paths
Touch Screen Display Controls
Programmable Transfer arm Resistance Sensor
Integrated Cassette-in-place Sensors
   

Portable Wand

Vacuum Wand Set

Vacuum tips

Vacuum Handles

  
 
     

Wafer 3-point mechanical gripper

Wafer Edge Pick

 -Shipping/receiving area:?Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.

-Epitaxial area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production or specialty EPI process cassette
     

Aluminum Process Cassettes

Aluminum Box Cassettes

Stainless Steel Process Cassettes

Process Cassettes 300mm

 Wet chemistry areas: Wafer transfers are used to move wafers between a WIP production cassette to a wet process Teflon PFA cassette when they enter wet chemistry areas. Thermal process bake areas: Wafer transfers are used to move wafers between a WIP production cassette and metal or quartz cassettes when they enter thermal process bake process areas
     

Mask Pick - Side Grip

Mask Pick - Horizontal Grip

 Probe and test areas: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette. Metrology and inspection areas: Wafer transfers may also occur in metrology and inspection areas where wafers are analyzed and inspected for defects and other quality control measures.
     

Manual Reticle SMIF Pod Opener, RSP150

Manual FOUP Opener, 300 mm

 Material Stage: Anti-Static/Natural Polypropylene
Material Arm: ESD-Safe Polyoxymethylene
Type: Automatic System
Slots: Wafers For 25-Slot Cassettes		 Precision automatic horizontal bulk wafer slide transfer for safely transferring 76 mm up to 200 mm wafers between two SEMI compliant wafer cassettes. Compatible with high-and low-profile plastic process, metal cassettes and most shipping cassettes with an H-BAR. Features a touchscreen display, integrated SEND and RECEIVE stage cassette-in-place sensors and an adjustable transfer arm resistance sensor which monitors for excessive forces during motion. Antistatic and chemical resistant materials. Iso 4 Cleanroom compatible.
     

Automatic Wafer Presenter

Manual Five-Wafer Lift Presenter

Manual Single Wafer Presenter

21-manual-wafer-escalators

  

 
 


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