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aligner)-Æĸ±·»ÄÚÅÍ(parynecoater)
Spin coater NS£402 ½Ã¸®Áî |
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±âÁ¾ |
¸Å´º¾ó ½ºÇÇ³Ê |
¸Å´º¾ó ½ºÇÉÄÚÅÍ |
»ç¾ç |
NS£402 |
NS£402D |
½Ã·á »çÀÌÁî |
¥õ10¡200 mm, ¤±150x150mmÀÌÇÏ |
same |
ÄÅ Áö¸§ ÀçÁú |
¥õ400 mm¡¤½ºÅÙ·¹½º |
same |
º»Ã¼ ÀçÁú¡¤Ä¡¼ö |
SS£«¼ÒºÎµµÀå |
SS£«¼ÒºÎµµÀå |
½ºÇÉ ¸ðÅÍ |
AC¼º¸¸ðÅÍ |
same |
ȸÀü¼ö |
0¡6000rpm |
same |
|
(º¼·ý ¼³Á¤¡¾1%) |
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ȸÀü Ç¥½Ã |
µðÁöÅ» Ç¥½Ã |
same |
ȸÀü´Ü¼ö |
25´Ü(µðÁöÅ»),100 Recipe |
same |
|
0.1 sec¡9900hrs |
|
Àü¿ø |
AC220V |
same |
CDA or N2 |
¾øÀ½ |
0.2 Mpa ÀÌ»ó |
Áø°ø |
200 Torr ÀÌ»ó |
same |
ÅäÃâ ³ëÁñ |
¾øÀ½ |
1 °èÅë ¼öµ¿ ½ºÀ®½Ä |
¿É¼Ç |
½Ã·á´ë ±âº» 1°³ |
½Ã·á´ë ±âº» 1°³ |
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Áø°ø ÆßÇÁ ±âº» |
Áø°ø ÆßÇÁ ±âº» |
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¾ÈÀü Ä¿¹ö |
¾ÈÀü Ä¿¹ö |
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¼¾ÅÍ ¸µ Ä¡±¸ |
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½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater