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Plasma ETCH Systems(ÇöóÁ ¿¡Ä¡ ½Ã½ºÅÛ)-

ÇöóÁ ¿¡Äª ½Ã½ºÅÛÀº º¸Åë Å©¸®´×, µð½ºÄÄ, ½ºÆ®¸®ÇÎ, ¾ÆÀ̽ºÆ®·ÎÇÈ ¿¡Äª¿¡ Àû¿ëÇÕ´Ï´Ù.

Reactive Ion ETCH Systems-(RIE ½Ã½ºÅÛ)

Reactive Ion Etching SystemsÀº º¸Åë Å©¸®´×, µð½ºÄÄ, ½ºÆ®¸®ÇÎ, ¾ð¾ÆÀ̽ºÆ®·ÎÇÈ (vertical side wall) ¿¡Äª¿¡ »ç¿ëÇÕ´Ï´Ù.

Barrel Ashing Systems-(¹è·² ŸÀÔ ¾Ö¼Å, ½ºÆ®¸®ÆÛ)

¹è·²Å¸ÀÔ ¾Ö¼Å´Â º¸Åë Å©¸®´×, µð½ºÄÄ¿¡ »ç¿ëÇϳª, ÁÖ·Î Çѹø¿¡ ´Ù¼öÀÇ ¿þÀÌÆÛÀÇ Æ÷Åä·¹Áö½ºÆ®¸¦ Á¦°ÅÇÏ´Â ¾Ö½³¿¡ »ç¿ëÇÕ´Ï´Ù.

Plasma Enhanced Chemical Vapor Deposition Systems-(PECVD ½Ã½ºÅÛ)

Plasma Enhanced Chemical Vapor Deposition SystemsÀº º¸Åë ±âÆÇÀ§¿¡ ½Ç¸®ÄÜ ´ÙÀÌ¿Á»çÀ̵å, ½Ç¸®ÄÜ ³ªÀÌÆ®¶óÀ̵åµîÀÇ À¯ÀüÃþÀ» ÁõÂøÇϴµ¥ »ç¿ëÇÕ´Ï´Ù.

Ion Milling Systems-(ÀÌ¿Â ¹Ð¸µ ½Ã½ºÅÛ)

Ion Milling SystemsÀº °í¼ÓµµÀÇ ÀÌ¿Â Ãæµ¹·Î ¹°ÁúÀ» Á¦°ÅÇϴµ¥¿¡ »ç¿ëÇÕ´Ï´Ù.

Sputtering Systems-(½ºÆÄŸ¸µ  ½Ã½ºÅÛ)

Sputtering SystemsÀº º¸Åë ±âÆÇÀ§¿¡ Àüµµ¼º ¸ÞÅ»À» ÁõÂø½ÃÅ°´Âµ¥¿¡ »ç¿ëÇÕ´Ï´Ù.

 

JSiTS Inc.

Tel)031-479-4211~2
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www.JSiTS.com
www.4pointprobe.com

E-mail;    JSi@JSiTS.com

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