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         PETS Inc. Plasma Enhanced Chemical Vapor Deposition System. Table Top

PETS Inc. Plasma Enhanced Chemical Vapor Deposition System (With Floor Model Option).

Plasma Enhanced Chemical Vapor Deposition SystemsÀº º¸Åë ±âÆÇÀ§¿¡ ½Ç¸®ÄÜ ´ÙÀÌ¿Á»çÀ̵å, ½Ç¸®ÄÜ ³ªÀÌÆ®¶óÀ̵åµîÀÇ À¯ÀüÃþÀ» ÁõÂøÇϴµ¥ »ç¿ëÇÕ´Ï´Ù.Àüµµ¼º ¾Æ¸ðÆÛ½º ½Ç¸®Äܵµ ÀÌ ½Ã½ºÅÛ¿¡¼­ ÁõÂøÇÕ´Ï´Ù..

Key Benefits

ÄÄÇ»ÅÍ·Î Á¦¾îÇÏ´Â ½Ã½ºÅÛÀ¸·Î¼­ ·±Åõ·±ÀÌ µ¿ÀÏÇÑ °á°ú¸¦ Á¦°øÇÕ´Ï´Ù

¸ðµç ÀÚµ¿ ·±¿¡ ´ëÇؼ­ µ¥ÀÌÅ͸¦ ÀúÀåÇÕ´Ï´Ù

¹«Á¦ÇÑÀÇ ·± ÇÁ·Î±×·¥ ÀúÀå(.rcp files)

è¹ö´Â »êÈ­ÇǸ· ¾Ë¹Ì´½À̳ª ½ºÅÙ·¹½º ½ºÆ¿¿¡¼­ ¼±ÅÃÇмö ÀÖ½À´Ï´Ù.

¼ö³Ã½Ä Àü±Ø, è¹ö, º£À̽º Ç÷¹ÀÌÆ®

Aluminum Oxide (ceramic) Àν¶·¹ÀÌÅÍ

N2 purge(¼±Åà »ç¾ç)

+ - 5% uniformity

°øÁ¤ setup Áö¿ø.

½Ã½ºÅÛÀº mechanical pump (14 cfm)¿Í connecting fittingÀÌ ±âº»ÀÔ´Ï´Ù

high frequency (13.56 MHz) or low frequency(40 KHz) power supplie¸¦ ¼±ÅÃÇÒ¼ö ÀÖ½À´Ï´Ù

¼±Åûç¾ç: ´Ù¿î½ºÆ®¸² ¾Ð·Â ÄÜÆ®·Ñ, Åͺ¸ ÆßÇÁ, ½ºÅ©·¯¹ö, ¿ÀÀÏ ÈÙÆ®·¹ÀÌ¼Ç ¹× Floor Model Cabinet.additional  ¹× AFC's

Description

MODEL #       

12" Al. Chamber, w/4 AFC's , Low Freq. RF

PETS-PECVD-A12-4-LF    

12" SS Chamber, w/4 AFC's , Low Freq. RF

PETS-PECVD-SS12-4-LF 

16" Al. Chamber, w/4 AFC's, Low Freq. RF

PETS-PECVD-A16-4-LF    

16" SS Chamber, w/4 AFC's, Low Freq. RF

PETS-PECVD-SS16-4-LF

12" Al. Chamber, w/4 AFC's , High Freq. RF

PETS-PECVD-A12-4-HF    

12" SS Chamber, w/4 AFC's , High Freq. RF

PETS-PECVD-SS12-4-HF

16" Al. Chamber, w/4 AFC's, High Freq. RF

PETS-PECVD-A16-4-HF    

16" SS Chamber, w/4 AFC's, High Freq. RF

PETS-PECVD-SS16-4-HF

 

JSiTS Inc.

Tel)031-479-4211~2   Fax)031-479-4213

  www.JSiTS.com www.4pointprobe.com

E-mail;JSi@JSiTS.com