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Reactive Ion Etching ½Ã½ºÅÛÀº º¸Åë Å©¸®´×, µð½ºÄĵ »ç¿ëÀ» Çϸç, ¿©·¯Á¾·ùÀÇ Çʸ§(Àüµµ¼º, À¯Àü¼º)À» ¿¡ÄªÇÕ´Ï´Ù.»çÀÌµå ¿ùÀº ¾ð¾ÆÀ̽ºÆ®·ÎÇÈÇÕ´Ï´Ù.

Key Benefits

ÄÄÇ»ÅÍ·Î Á¦¾îÇÏ´Â ½Ã½ºÅÛÀ¸·Î¼­ ·±Åõ·±ÀÌ µ¿ÀÏÇÑ °á°ú¸¦ Á¦°øÇÕ´Ï´Ù.

¸ðµç ÀÚµ¿ ·±¿¡ ´ëÇؼ­ µ¥ÀÌÅ͸¦ ÀúÀåÇÕ´Ï´Ù

¹«Á¦ÇÑÀÇ ·± ÇÁ·Î±×·¥ ÀúÀå(.rcp files

è¹ö´Â »êÈ­ÇǸ· ¾Ë¹Ì´½À̳ª ½ºÅÙ·¹½º ½ºÆ¿¿¡¼­ ¼±ÅÃÇмö ÀÖ½À´Ï´Ù.

¼ö³Ã½Ä Àü±Ø, è¹ö, º£À̽º Ç÷¹ÀÌÆ®

Aluminum Oxide (ceramic) Àν¶·¹ÀÌÅÍ.

N2 purge(¼±Åà »ç¾ç).

+ - 5% uniformity .

°øÁ¤ setup Áö¿ø.

½Ã½ºÅÛÀº mechanical pump (14 cfm)¿Í connecting fittingÀÌ ±âº»ÀÔ´Ï´Ù..

high frequency (13.56 MHz) or low frequency(40 KHz) power supplie¸¦ ¼±ÅÃÇÒ¼ö ÀÖ½À´Ï´Ù...

¼±Åûç¾ç: ´Ù¿î½ºÆ®¸² ¾Ð·Â ÄÜÆ®·Ñ, Åͺ¸ ÆßÇÁ, ½ºÅ©·¯¹ö, ¿ÀÀÏ ÈÙÆ®·¹ÀÌ¼Ç ¹× Floor Model Cabinet.additional  ¹× Ãß°¡ÀÇ AFC's

Description

MODEL #       

12" Al. Chamber, w/2 AFC's , Low Freq. RF

PETS-RIE-A12-2-LF    

12" Al. Chamber, w/4 AFC's , Low Freq. RF

PETS-RIE-A12-4-LF    

12" SS Chamber, w/2 AFC's, Low Freq. RF

PETS-RIE-SS12-2-LF

12" SS Chamber, w/4 AFC's , Low Freq. RF

PETS-RIE-SS12-4-LF 

16" Al. Chamber, w/2 AFC's , Low Freq. RF

PETS-RIE-A16-2-LF    

16" Al. Chamber, w/4 AFC's, Low Freq. RF

PETS-RIE-A16-4-LF    

16" SS Chamber, w/2 AFC's, Low Freq. RF

PETS-RIE-SS16-2-LF 

16" SS Chamber, w/4 AFC's, Low Freq. RF

PETS-RIE-SS16-4-LF

12" Al. Chamber, w/2 AFC's , High Freq. RF

PETS-RIE-A12-2-HF    

12" Al. Chamber, w/4 AFC's , High Freq. RF

PETS-RIE-A12-4-HF    

12" SS Chamber, w/2 AFC's, High Freq. RF

PETS-RIE-SS12-2-HF

12" SS Chamber, w/4 AFC's , High Freq. RF

PETS-RIE-SS12-4-HF

16" Al. Chamber, w/2 AFC's , High Freq. RF

PETS-RIE-A16-2-HF    

16" Al. Chamber, w/4 AFC's, High Freq. RF

PETS-RIE-A16-4-HF    

16" SS Chamber, w/2 AFC's, High Freq. RF

PETS-RIE-SS16-2-HF

16" SS Chamber, w/4 AFC's, High Freq. RF

PETS-RIE-SS16-4-HF

JSiTS Inc.                                                        

Tel)031-479-4211~2   Fax)031-479-4213

                                                        www.JSiTS.com       www.4pointprobe.com

                                                                    E-mail;    JSi@JSiTS.com