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                 PETS Inc. Sputtering System (Sputter Up Configuration).

Sputtering SystemsÀº º¸Åë ±âÆÇÀ§¿¡ Àüµµ¼º ¸ÞÅ»À» ÁõÂø½ÃÅ°´Âµ¥¿¡ »ç¿ëÇÕ´Ï´Ù.. PETS IncÀÇ ÆÄ¿ö ¼Ò½º´Â ¸¶±×³×Æ®·ÐÀ̸ç, ¸ðµç ½Ã½ºÅÛ¿¡ D.C. Power Supply¸¦ »ç¿ëÇÕ´Ï´Ù

Key Benefits

ÄÄÇ»ÅÍ Á¦¾î¸¦ ÅëÇØ ÀÛµ¿½Ã¸¶´Ù Ç×»ó µ¿ÀÏÇÑ process parameter ¸¦ º¸ÁõÇÕ´Ï´Ù.

¸ðµç ÀÚµ¿ ·±¿¡ ´ëÇؼ­ Data logging ÇÕ´Ï´Ù..

¹«Á¦ÇÑÀÇ ·± ÇÁ·Î±×·¥ ÀúÀå(.rcp files).

è¹ö´Â »êÈ­ÇǸ· ¾Ë¹Ì´½À̳ª ½ºÅÙ·¹½º ½ºÆ¿Áß¿¡¼­ ¼±ÅÃÇÒ¼ö ÀÖ½À´Ï´Ù

1¼¼Æ®ÀÇ Ã¨¹ö ¶óÀ̳ʴ ±âº»Æ÷ÇԵ˴ϴÙ.

¼ö³Ã½Ä magnetron source¿Í platen  ¹× chamber.

N2 purge(¼±Åà »ç¾ç)

Dynamic sputtering½Ã + - 8% uniformity ¿Í + - 12% static. º¸ÁõµÊ

°øÁ¤ setup Áö¿ø°¡´É

.½Ã½ºÅÛÀº connecting fittingÀ̺ÎÂøµÈ mechanical pump (14 cfm)¿Í Åͺ¸ÆßÇÁ(ÄÜÆ®·Ñ·¯ Æ÷ÇÔ)°¡ ±âº»Æ÷ÇԵ˴ϴÙ

 

500 WattD.C. power supply (1000 Watts´Â ¼±Åûç¾çÀÔ´Ï´Ù).

¼±Åà »ç¾ç: Down Stream Pressure Control, Turbo Pumping, Cryo Pumping, Oil Filtration, additional source, etching station and additional AFC's

Description

MODEL #       

16" Al. Chamber, w/2 AFC's, 2 sources (3")

PETS-SPUT-A16-2       

16" SS Chamber, w/2 AFC's, 2 sources (3")

PETS-SPUT-SS16-2    

20" Al. Chamber, w/2 AFC's , 2 sources (4")

PETS-SPUT-A20-2       

20" SS Chamber, w/2 AFC's , 2 sources (4")

PETS-SPUT-SS20-2    

24" Al. Chamber, w/2 AFC's, 2 sources (6")

PETS-SPUT-A24-2       

24" SS Chamber, w/2 AFC's, 2 sources (6")

PETS-SPUT-SS24-2    

JSiTS Inc.

                                                         Tel)031-479-4211~2   Fax)031-479-4213

                                                        www.JSiTS.com       www.4pointprobe.com

                                                                    E-mail;    JSi@JSiTS.com