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  Plasma Etching System Chamber/Electrode

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PETS Inc. Plasma Etching System Chamber/Electrode

ÇöóÁ ¿¡Äª ½Ã½ºÅÛÀº º¸Åë Å©¸®´×, µð½ºÄĵ »ç¿ëÀ» Çϸç, ¿©·¯Á¾·ùÀÇ Çʸ§(Àüµµ¼º, À¯Àü¼º)À» ¿¡ÄªÇÕ´Ï´Ù.

Key Benefits

 

ÄÄÇ»ÅÍ Á¦¾î¸¦ ÅëÇØ ÀÛµ¿½Ã¸¶´Ù Ç×»ó µ¿ÀÏÇÑ process parameter ¸¦ º¸ÁõÇÕ´Ï´Ù.

¸ðµç ÀÚµ¿ ·±¿¡ ´ëÇؼ­ Data logging ÇÕ´Ï´Ù.

¹«Á¦ÇÑÀÇ ·± ÇÁ·Î±×·¥ ÀúÀå(.rcp files).

è¹ö´Â »êÈ­ÇǸ· ¾Ë¹Ì´½À̳ª ½ºÅÙ·¹½º ½ºÆ¿Áß¿¡¼­ ¼±ÅÃÇÒ¼ö ÀÖ½À´Ï´Ù

¼ö³Ã½Ä Àü±Ø, è¹ö, º£À̽º Ç÷¹ÀÌÆ®

N2 purge(¼±Åà »ç¾ç).

+ - 5% uniformity º¸Áõ

°øÁ¤ setup Áö¿ø°¡´É.

½Ã½ºÅÛÀº connecting fittingÀÌ ´Þ¸° mechanical pump (14 cfm)°¡ ±âº»Æ÷ÇԵ˴ϴÙ

high frequency (13.56 MHz) or low frequency(40 KHz) power supply¸¦ ¼±ÅÃÇÒ¼ö ÀÖ½À´Ï´Ù..

¼±Åûç¾ç: Down Stream Pressure Control, Turbo Pumping, Scrubber, Oil Filtration and Floor Model Cabinets.

Description

MODEL #       

12" Al. Chamber, w/2 AFC's , Low Freq. RF

PETS-PE-A12-2-LF    

12" Al. Chamber, w/4 AFC's , Low Freq. RF

PETS-PE-A12-4-LF    

12" SS Chamber, w/2 AFC's, Low Freq. RF

PETS-PE-SS12-2-LF

12" SS Chamber, w/4 AFC's , Low Freq. RF

PETS-PE-SS12-4-LF 

16" Al. Chamber, w/2 AFC's , Low Freq. RF

PETS-PE-A16-2-LF    

16" Al. Chamber, w/4 AFC's, Low Freq. RF

PETS-PE-A16-4-LF    

16" SS Chamber, w/2 AFC's, Low Freq. RF

PETS-PE-SS16-2-LF 

16" SS Chamber, w/4 AFC's, Low Freq. RF

PETS-PE-SS16-4-LF

12" Al. Chamber, w/2 AFC's , High Freq. RF

PETS-PE-A12-2-HF    

12" Al. Chamber, w/4 AFC's , High Freq. RF

PETS-PE-A12-4-HF    

12" SS Chamber, w/2 AFC's, High Freq. RF

PETS-PE-SS12-2-HF

12" SS Chamber, w/4 AFC's , High Freq. RF

PETS-PE-SS12-4-HF

16" Al. Chamber, w/2 AFC's , High Freq. RF

PETS-PE-A16-2-HF    

16" Al. Chamber, w/4 AFC's, High Freq. RF

PETS-PE-A16-4-HF    

16" SS Chamber, w/2 AFC's, High Freq. RF

PETS-PE-SS16-2-HF

16" SS Chamber, w/4 AFC's, High Freq. RF

PETS-PE-SS16-4-HF

JSiTS Inc.

Tel)031-479-4211~2 Fax)031-479-4213

  www.JSiTS.com www.4pointprobe.com

E-mail;    JSi@JSiTS.com