½ºÇÉÄÚÅÍ(Spincoater) ¸¶½ºÅ©¾ó¶óÀ̳Ê(Mask
Aligner) Æĸ±·»ÄÚÅÍ(Pparylene
Coater)
Spin coater JSI£402,603,803 ½Ã¸®Áî |
|||
±âÁ¾ |
¸Å´º¾ó ½ºÇÇ³Ê |
¸Å´º¾ó ½ºÇÉÄÚÅÍ |
¸Å´º¾ó ½ºÇÉÄÚÅÍ |
Ç° ¸í |
JSI£402a |
JSI£603a |
JSI£803a |
½Ã·á »çÀÌÁî |
¥õ10¡100mm dia ÀÌÇÏ |
10-150mm dia ÀÌÇÏ |
10-200mm dia ÀÌÇÏ |
|
(100 gÀÌÇÏ) |
|
|
ÄÅ Áö¸§ ÀçÁú |
¥õ200 mm¡¤½ºÅÙ·¹½º ¶Ç´Â NPP |
¥õ250 mm¡¤½ºÅÙ·¹½º ¶Ç´Â NPP |
¥õ300 mm¡¤½ºÅÙ·¹½º ¶Ç´Â PTFE |
º»Ã¼ ÀçÁú¡¤Ä¡¼ö |
SS |
SS |
SS |
|
300W*300D*270Hmm |
350W*450D*270Hmm |
400W*500D*320Hmm |
½ºÇÉ ¸ðÅÍ |
½ºÇǵå ÄÜÆ®·Ñ ¸ðÅÍ |
same |
same |
ȸÀü¼ö |
250¡5000rpm |
250¡6000rpm |
250¡5000rpm |
|
|
|
|
ȸÀü Ç¥½Ã |
µðÁöÅÐ µð½ºÇ÷¹ÀÌ |
same |
same |
|
(Àü¾Ð Ç¥½Ã ´ëÀÀ) |
|
|
ȸÀüSTEP |
2´Ü |
3´Ü |
3´Ü |
|
1 sec¡999sec |
same
|
same
|
Àü¿ø |
AC220V |
same |
same |
Áø°ø |
200 Torr ÀÌ»ó |
same |
same |
ÅäÃâ ³ëÁñ(¿É¼Ç) |
|
1 °èÅë ¼öµ¿ ½ºÀ®½Ä |
1 °èÅë ¼öµ¿ ½ºÀ®½Ä |
¿É¼Ç |
ô±âº» 1°³ |
ô±âº» 1°³ |
ô±âº» 1°³ |
|
|
|
|
|
¾ÈÀü Ä¿¹ö |
¾ÈÀü Ä¿¹ö |
¾ÈÀü Ä¿¹ö |
|
|
|
|
|
|
|
½ÇÁ¦ ¿Ü°üÀº »çÁø°ú Â÷À̳¯¼ö ÀÖ½¿
°æ±âµµ
¾È¾ç½Ã µ¿¾È±¸ È£°è 555-9
¾È¾ç
±¹Á¦ À¯Åë´ÜÁö 17µ¿ 127È£
Tel
: (031) 479-4211/2, Fax : (031) 479-4213
1992-2001
,Jsi.co. All rights reserved
Contact us : jsi@jsits.com
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater