½ºÇÉÄÚÅÍ(Spincoater) ¸¶½ºÅ©¾ó¶óÀ̳Ê(Mask
Aligner) Æĸ±·»ÄÚÅÍ(Pparylene
Coater)
Spin coater NS£302 ½Ã¸®Áî |
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±âÁ¾ |
¸Å´º¾ó ½ºÇÇ³Ê |
¸Å´º¾ó ½ºÇÉÄÚÅÍ |
Ç° ¸í |
NS£302 |
NS£302D |
½Ã·á »çÀÌÁî |
¥õ10¡160 mmÀÌÇÏ |
same |
|
(100 gÀÌÇÏ) |
|
ÄÅ Áö¸§ ÀçÁú |
¥õ300 mm¡¤½ºÅÙ·¹½º |
same |
º»Ã¼ ÀçÁú¡¤Ä¡¼ö |
SS£«¼ÒºÎµµÀå |
SS£«¼ÒºÎµµÀå |
|
350W*450D*310Hmm |
430W*450D*310Hmm |
½ºÇÉ ¸ðÅÍ |
AC¼º¸¸ðÅÍ |
same |
ȸÀü¼ö |
250¡5000rpm |
same |
|
(º¼·ý ¼³Á¤¡¾1%) |
|
ȸÀü Ç¥½Ã |
µðÁöÅ» Ç¥½Ã |
same |
ȸÀü´Ü¼ö |
25´Ü(µðÁöÅ»), 100 Recipe |
same |
|
0.1 sec¡9900hrs |
|
Àü¿ø |
AC220V |
same |
CDA or N2 |
¾øÀ½ |
0.2 Mpa ÀÌ»ó |
Áø°ø |
200 Torr ÀÌ»ó |
same |
ÅäÃâ ³ëÁñ |
¾øÀ½ |
1 °èÅë ¼öµ¿ ½ºÀ®½Ä |
¿É¼Ç |
½Ã·á´ë ±âº» 1°³ |
½Ã·á´ë ±âº» 1°³ |
|
Áø°ø ÆßÇÁ ±âº» |
Áø°ø ÆßÇÁ ±âº» |
|
¾ÈÀü Ä¿¹ö |
¾ÈÀü Ä¿¹ö |
|
Ÿ |
¼¾ÅÍ ¸µ Ä¡±¸ |
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¾È¾ç½Ã µ¿¾È±¸ È£°è 555-9
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: (031) 479-4211/2, Fax : (031) 479-4213
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½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater