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스핀코터&악세사리(Spin
Coaters & Accessories)
Table-Top
Spin Coaters.
Specialty Coating Systems offers high quality, low cost,
portable spin coaters designed specifically for laboratory and other
low volume spin coating activities. An eight inch bowl and a twelve
inch bowl are available. The spin coater applies uniform, pinhole free
coatings with remarkable precision.
High
Performance Coating Research.
SCS promotes the advancement of High Performance
Coating Research. Currently we are assisting Dr. Dunbar Birnie
of the University of Arizona on his Spin Coating Research. For
more information about Dr. Dunbar Birnie's research, click
here.
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P6708
/ P6712 스핀코터(Spin Coaters)
 The
P6708 (8-in. bowl) and P6712 (12-in. bowl) precision coating systems
are capable of executing thirty full-automated, user-determined
coating sequences under the supervision of a programmable logic
controller. Each recipe consists of multiple ramp up, hold, and
ramp down steps in the range of 100-8,000 RPM. Acceleration and
deceleration rates are computer-calculated based on the desired
profile.
 These
models include a simple keypad for programming and operation,
and a user interface screen for display of process parameters.
The unit is capable of handling a variety of substrate sizes and
shapes up to 10 inches in diameter. Optional spin coater features
include multiple coating material dispensing valves, interchangeable
vacuum chucks, and world-wide voltage values.
Optional
Fluid Dispenser.
Designed to be full integrated with our 6700 series. Comes complete
with three dispensing needles.
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Coating
Types:
Photoresists, Anti-Reflectives, Polyimides, Metallo-Organics,
Dopants, Silica Films, and Most Organic and Aqueous Solutions
Speed:
100-8000 RPM, Programmable
Automatic
Timer:
0-999 seconds
Acceleration/Deceleration:
Ramp times from 1.0 to 30 seconds
Power:
115 VAC, 60Hz, 1 amp
or 220 VAC, 50Hz, .5 amp
P6708
w/ optional
Plexiglass Hood
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P6204
스핀코터(Spin Coater)
 The
P6204 (8-in. bowl) Non-programmable Spin Coater was designed for
the value conscience in mind. Same high quality as our P6708/6712
series without many of the programmable and regulating options.
Speed is controlled by adjustable settings.
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Speed:
100-8000 RPM, Adjustable
Automatic
Timer:
0-999 seconds
Acceleration/Deceleration:
Ramp
times from 1.0 to 30 seconds
Power:
115 VAC, 60Hz, 1 amp
or 220 VAC, 50Hz, .5 amp
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스핀코터
척(chuck) 선택요령
SCS
chucks are machined to close tolerances and provide an exceptionally
flat, rigid surface for mounting substrates of different sizes, weights,
and shapes. Custom chucks are also available.
Proper
chuck selection should be based upon substrate size and rigidity. The
proper chuck diameter is 1/4 to 1 inch smaller than the substrate diameter.
The entire substrate should be supported if it is flexible, fragile,
or when it is to be wiped or brushed during cleaning. Vacuum chucks
are available in stainless steel, hard anodized aluminum, or DELRIN®.
Please specify the material of choice and chuck size when ordering.
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Type
CS Chuck
Used to hold a thin, planar surfaced substrate such as silicon,
glass, or germanium on a spinning shaft for higher or maximum RPMs. |
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Type
H Chuck
Used to hold relatively heavy substrates such as glass, quartz,
ceramic, metal, etc. |
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Type
L Chuck
Used to hold heavy, large or unsymmetrical substrates. The guide
fingers assist in proper positioning and holding of the substrate. |
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Type
R Chuck
Used to hold square or rectangular substrates. Design achieves a
uniform coating across the entire substrate. Custom milled recess
holds substrate. |
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