º» Á¦Ç°Àº ½ºÇÁ·¹ÀÌ(airless) ÄÚÆÿëÀÔ´Ï´Ù. Ư¼öÇÑ ¼Öº¥Æ®(MPA/GBL)´Â ½ºÇÁ·¹ÀÌ ÄÚÆÃÁß °ÇÁ¶°úÁ¤¿¡¼ ¹ß»ýÇÏ´Â ¾û±è Çö»óÀ» ¹æÁöÇÕ´Ï´Ù.
Property |
Unit |
Value |
Method |
---|---|---|---|
»ö»ó(unexposed) |
|
dark-blue |
visual |
»ö»ó(exposed) |
|
bluish |
visual |
Á¡µµ@ 20¡ÆC |
|
* |
|
¹Ðµµ(liquid) |
g/cm©ø |
0.9 |
gravimetric |
¹Ðµµ(solid) |
g/cm©ø |
1.25 |
gravimetric |
°íÇü¼ººÐ |
%wt |
35 |
gravimetric |
±¤°¨µµ(Photosensitivity) |
Stouffer SSG21 |
4 - 5 |
see processing |
Ç¥¸é |
|
hard-contact exposure |
|
* »ç¿ëÇϱâÀü¿¡ Á¡µµ Á¶ÀýÀÀ ÇÒ ÇÊ¿ä°¡ ¾ø½À´Ï´Ù.
Processing
Process step |
Typical conditions |
---|---|
Pre-clean |
Ensure dry metal surface, free from dust and other contaminants (oil, grease and other stains) |
Application |
airless-spray-coating |
Flash-off |
5-10 min at room temperature |
Drying |
5 - 10 min @ 80¡ÆC in convection oven |
Exposure** |
150 - 300 mJ/cm©÷ (350 - 400 nm) |
Developing |
1% aqueous sodium carbonate; 35¡ÆC; 30 - 60 sec |
Etching |
suitable for acidic media (ferric chloride, cupric chloride); limited stability in alkaline etchants (aqueous ammonia) |
Stripping |
2 - 5% potassium hydroxide at 50-90¡ÆC |
**Heavily depending on exposure equipment used (Intensity, Geometrics)