DiaEtch 100

dipcoater1.jpg (66889 bytes)

Lab-type dip-coater

ÀÌ Á¦Ç°Àº µö ÄÚÆÿëÀÌ¸ç ºü¸£°Ô ±âÈ­ÇÏ´Â ¼Öº¥Æ® (1-Propanole) ´Â ÇϴܺÎÅÍ µöÇÎÀ» ÇÒ ¶§ ºÐ´ç 12cmÀÇ ¼Óµµ·Î Áõ¹ßÇϹǷΠÆ÷Åä·¹Áö½ºÆ®(photoresist)ÀÇ ¼Õ½ÇÀÌ ¾ø½À´Ï´Ù. ÀÌ Á¦Ç°¿¡¼­ Ä¿´Ù¶õ ·¹Áö½ºÆ® ºñµå¸¦ °üÂûÇÒ¼ö ¾øÀ¸¸ç Àú¼Ó(low speed)¿¡¼­´Â ·¹Áö½ºÆ®ÀÇ ¹æ¿ïÁüÀÌ ¾ø½À´Ï´Ù.

 

 

Ư   ¼º

Property

Unit

Value

Method

»ö»ó(unexposed)

n.a.

¾Ïû»ö

visual

»ö»ó(exposed)

n.a.

û»ö

visual

Viscosity @ 20¡ÆC

sec

90 *

Zahn Cup No.1

¹Ðµµ(liquid)

g/cm©ø

0.9

gravimetric

¹Ðµµ (solid)

g/cm©ø

1.25

gravimetric

°íÇü ¼ººÐt

%wt

27.5

gravimetric

±¤°¨¼º(Photosensitivity)

Stouffer SSG21

4 - 5

see processing

Ç¥¸é

n.a.

hard-contact

exposure

exposure in vacuum frame

»ç¿ëÇϱâÀü¿¡ Á¡µµ Á¶ÀýÀÀ ÇÒ ÇÊ¿ä°¡ ¾ø½À´Ï´Ù.

°ø   Á¤

Process step

   Á¶   °Ç

Application

Dip-coating at withdrawal speed between 5 - 20 cm/min

Flash-off

1-5 min at room temperature

°Ç   Á¶

5 - 10 min @ 80¡ÆC in convection oven

³ë±¤(Exposure)

150 - 300 mJ/cm©÷ (300 - 350 nm)

Çö»ó(Developing)

1% aqueous sodium carbonate; 35¡ÆC; 30 - 60 sec **

¿¡Äª(Etching)

suitable for acidic media (ferric chloride, cupric chloride); limited stability in alkaline etchants (aqueous ammonia)

¹Ú¸®(Stripping)

2 - 5% potassium hydroxide at 50-90¡ÆC
OR
1-Methyl-pyrrolidone (NMP; CAS-No.: 872-50-4) at 40...60¡ÆC for polished and/or sensitive surfaces, such as aluminum, magnesia etc.

** 110¡ÆC¿¡¼­ 10ºÐµ¿¾ÈÀÇ Æ÷½ºÆ® º£ÀÌÅ©´Â Á¢Âø¼º°ú ±â°èÀû ¾ÈÁ¤¼ºÀ» Çâ»ó ½Ãŵ´Ï´Ù.