Mask Size

pai 200mm or less

Chamber Material

PVC

Body Size/ Material

1050Wx850DX1100H mm/SUS

Spin Motor

AC Turbo Motor 400W

Spin Rotation

Max. 5000 RPM

Brush Rotation

50~200 RPM

Rotation Controller

Digital Controller

Brush Material

Nylon, PVA sponge

Megasonic

1 MHz

Power Supply

AC200V, 30A, 50/60 Hz¡¾10% or less

N2 source

0.2MPa abobe, 50L/min, ¨ª6 connection

Air source

0.4MPa abobe, 20L/min, ¨ª6 connection

Pure Water source

0.2MPa abobe, 10L/min, PT1/2 connection

Drainage

2 lines, PVC-25A

Exhaust

2 lines, PVC-100A